Measure the width of the stairs using a tape measure. Transfer that measurement to a treated 1-by-4 board. Cut the board just slightly less than that measurement using a saw. Drill holes every 12 inches into the center of the large surface of this board using a drill and wood drill bit. Position the board on the stairs and cut out more boards until the top of the bottom stair is covered. Drill similar holes in these boards as well.
Turn the hammer drill to the hammer setting on its highest power. Drill down through each of the holes in the stair boards, drilling just deep enough to mark the concrete surface. Remove the stair boards after all the screw holes have been marked.
Drill into each marking with the hammer drill, making each hole slightly more than 2 inches deep. Use a drill bit that is visibly smaller than the masonry screws you will be using. Back out the drill bit a few times on each hole to get the cement rubble out of the hole and let the drill bit cool off. Replace masonry drill bits when the drill stops progressing into the hole noticeably.
Reposition the stair boards over the holes so that the board holds and the stair holes line up perfectly. Set 3-inch masonry screws in each hole and tighten the screws completely with the hammer drill. Tighten the screws until the screw head is flush with the upper surface of the stair board.